Controlled placement of aligned carbon nanotubes |
||||||
|
The precise placement of carbon nanotubes is vital to their incorporation into the next generation of electronic devices. To address this issue, we have developed a simple method to deposit nanotubes in predetermined orientations and positions which can easily be integrated into standard silicon microprocessing. |
||||||
|
|
||||||
|
Preferential alignment is achieved by spinning the substrate during fluidic deposition, causing the nanotubes to line up with the direction of fluid flow. Localized deposition is obtained by selectively patterning an adhesive polymer surface layer with the focused electron beam of a scanning electron microscope.
The alignment and selective deposition process can be easily integrated into standard silicon microfabrication processes to create arrays of nanotube devices such as torsional or rotational actuators.
| ||||||
|
